Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082977 | Ceramic mounting for wafer apparatus with thermal expansion feature | Munetoshi Nagasaka | 2011-12-27 |
| 7994809 | Transfer mechanism for target object to be inspected | Hiroshi Yamada, Tomoya Endo | 2011-08-09 |