Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082977 | Ceramic mounting for wafer apparatus with thermal expansion feature | Yutaka Akaike | 2011-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8082977 | Ceramic mounting for wafer apparatus with thermal expansion feature | Yutaka Akaike | 2011-12-27 |