YS

Yuichiro Sakamoto

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #118,854 of 364,097Top 35%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8056503 Plasma procesor and plasma processing method Akihiro Kikuchi, Satoshi Kayamori, Shinya Shima, Kimihiro Higuchi, Kaoru Oohashi +3 more 2011-11-15