SK

Satoshi Kayamori

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #174,381 of 364,097Top 50%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8056503 Plasma procesor and plasma processing method Akihiro Kikuchi, Shinya Shima, Yuichiro Sakamoto, Kimihiro Higuchi, Kaoru Oohashi +3 more 2011-11-15