VL

Vinh Luong

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
📍 Guilderland, NY: #6 of 14 inventorsTop 45%
🗺 New York: #3,659 of 10,473 inventorsTop 35%
Overall (2011): #136,042 of 364,097Top 40%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7998872 Method for etching a silicon-containing ARC layer to reduce roughness and CD Masaru Nishino, Vaidyanathan Balasubramaniam 2011-08-16