Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998872 | Method for etching a silicon-containing ARC layer to reduce roughness and CD | Masaru Nishino, Vaidyanathan Balasubramaniam | 2011-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7998872 | Method for etching a silicon-containing ARC layer to reduce roughness and CD | Masaru Nishino, Vaidyanathan Balasubramaniam | 2011-08-16 |