SY

Shojiro Yahata

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
Overall (2011): #164,815 of 364,097Top 50%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8052364 Coupling member and plasma processing apparatus Hachishiro Iizuka 2011-11-08