Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052364 | Coupling member and plasma processing apparatus | Shojiro Yahata | 2011-11-08 |
| 8043471 | Plasma processing apparatus | — | 2011-10-25 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052364 | Coupling member and plasma processing apparatus | Shojiro Yahata | 2011-11-08 |
| 8043471 | Plasma processing apparatus | — | 2011-10-25 |