Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959970 | System and method of removing chamber residues from a plasma processing system in a dry cleaning process | Aelan Mosden, Robert J. Soave | 2011-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959970 | System and method of removing chamber residues from a plasma processing system in a dry cleaning process | Aelan Mosden, Robert J. Soave | 2011-06-14 |