Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7981794 | Film forming method and substrate processing apparatus | Fumitaka Amano, Satoshi Wakabayashi | 2011-07-19 |
| 7906442 | Gas treatment method and computer readable storage medium | Satoshi Wakabayashi | 2011-03-15 |