FA

Fumitaka Amano

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
📍 Yokkaichi, NY: #6 of 6 inventorsTop 100%
Overall (2011): #301,844 of 364,097Top 85%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7981794 Film forming method and substrate processing apparatus Kensaku Narushima, Satoshi Wakabayashi 2011-07-19