Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8007968 | Substrate processing method, program, computer-readable storage medium and substrate processing system | Yoshiaki Yamada, Tadayuki Yamaguchi, Yuuichi Yamamoto, Yasuhito Saiga | 2011-08-30 |
| 7960078 | Exposure condition setting method, substrate processing device, and computer program | Akihiro Sonoda | 2011-06-14 |