Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8065113 | Control device and analyzer | Ken'ichi Okuno, Hiroyuki Morihara, Tomomi Sugiyama | 2011-11-22 |
| 8007968 | Substrate processing method, program, computer-readable storage medium and substrate processing system | Yoshiaki Yamada, Yuuichi Yamamoto, Yasuhito Saiga, Kazuo Sawai | 2011-08-30 |
| 8010223 | Quality control system and quality control information delivery device | Minoru Takayanagi, Takeshi Matsumoto, Tamiko Fujita | 2011-08-30 |
| 7998741 | Remote control system | Mizuho Nishikiori, Hiroshi Murakami | 2011-08-16 |
| 7925461 | Quality control system, analyzer, and quality control method | Atsushi Shirakami, Etsuro Shinkai, Yasuhiro Ochi | 2011-04-12 |
| 7901149 | Substrate processing method, program, computer-readable recording medium, and substrate processing system | Yoshiaki Yamada, Yuuichi Yamamoto, Yasuhito Saiga | 2011-03-08 |