Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048326 | Method and apparatus for determining an etch property using an endpoint signal | Hieu Lam | 2011-11-01 |
| 7972483 | Method of fault detection for material process system | John Donohue | 2011-07-05 |