HN

Hiroshi Nagahata

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
📍 Rifu, JP: #95 of 259 inventorsTop 40%
Overall (2011): #285,985 of 364,097Top 80%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8058585 Plasma processing method, plasma processing apparatus and storage medium Hiroki Amemiya, Akihito Toda 2011-11-15