Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8058585 | Plasma processing method, plasma processing apparatus and storage medium | Akihito Toda, Hiroshi Nagahata | 2011-11-15 |
| 7875196 | Method for forming micro lenses | — | 2011-01-25 |
| 7862732 | Method for forming micro lenses and semiconductor device including the micro lenses | — | 2011-01-04 |