Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026177 | Silicon dioxide cantilever support and method for silicon etched structures | Kalin V. Lazarov, Brian E. Goodlin | 2011-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8026177 | Silicon dioxide cantilever support and method for silicon etched structures | Kalin V. Lazarov, Brian E. Goodlin | 2011-09-27 |