Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043973 | Mask overhang reduction or elimination after substrate etch | Thomas D. Bonifield | 2011-10-25 |
| 8026177 | Silicon dioxide cantilever support and method for silicon etched structures | Walter B. Meinel, Kalin V. Lazarov | 2011-09-27 |