Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972977 | ALD of metal silicate films | Chang-Gong Wang, Eric James Shero | 2011-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972977 | ALD of metal silicate films | Chang-Gong Wang, Eric James Shero | 2011-07-05 |