Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972977 | ALD of metal silicate films | Chang-Gong Wang, Glen Wilk | 2011-07-05 |
| 7914847 | Reactor surface passivation through chemical deactivation | Mohith Verghese | 2011-03-29 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972977 | ALD of metal silicate films | Chang-Gong Wang, Glen Wilk | 2011-07-05 |
| 7914847 | Reactor surface passivation through chemical deactivation | Mohith Verghese | 2011-03-29 |