Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7984393 | System and method for making photomasks | Thomas J. Aton | 2011-07-19 |
| 7930656 | System and method for making photomasks | Thomas J. Aton, Frank Scott Johnson, James Walter Blatchford, Benjamen M. Rathsack, Benjamin P. McKee | 2011-04-19 |
| 7906253 | System and method for making photomasks | Thomas J. Aton | 2011-03-15 |
| 7890912 | Treatment of trim photomask data for alternating phase shift lithography | — | 2011-02-15 |