Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041440 | Method and system for providing a selection of golden tools for better defect density and product yield | Chang Yung Cheng, Hsueh-Shih Fu, Chin-Kun Wang | 2011-10-18 |
| 7955993 | Oxygen plasma reduction to eliminate precursor overflow in BPTEOS film deposition | Chin Kun Lan, Sheng-Wen Chen, Hung Jui Chang, Yu-Ku Lin | 2011-06-07 |