Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955993 | Oxygen plasma reduction to eliminate precursor overflow in BPTEOS film deposition | Chin Kun Lan, Sheng-Wen Chen, Yu-Ku Lin, Ying-Lang Wang | 2011-06-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7955993 | Oxygen plasma reduction to eliminate precursor overflow in BPTEOS film deposition | Chin Kun Lan, Sheng-Wen Chen, Yu-Ku Lin, Ying-Lang Wang | 2011-06-07 |