Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8053865 | MOM capacitors integrated with air-gaps | Chung-Long Chang, Ming-Shih Yeh, Chia-Yi Chen | 2011-11-08 |
| 8054444 | Lens cleaning module for immersion lithography apparatus | Burn Jeng Lin | 2011-11-08 |
| 8022458 | Capacitors integrated with metal gate formation | Chung-Long Chang, Chia-Yi Chen, I-Lu Wu | 2011-09-20 |
| 7924397 | Anti-corrosion layer on objective lens for liquid immersion lithography applications | Burn Jeng Lin | 2011-04-12 |