Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7973909 | Method and apparatus for using a synchrotron as a source in extreme ultraviolet lithography | — | 2011-07-05 |
| 7966582 | Method and apparatus for modeling long-range EUVL flare | Brian S. Ward, Kunal N. Taravade | 2011-06-21 |
| 7933471 | Method and system for correlating physical model representation to pattern layout | Jianliang Li, Qiliang Yan, James P. Shiely | 2011-04-26 |
| 7934174 | Method and apparatus for using a database to quickly identify and correct a manufacturing problem area in a layout | Zong Wu Tang, Daniel Zhang, Juhwan Kim, Hua Song, Weiping Fang | 2011-04-26 |
| 7934176 | Method and apparatus for determining a process model that models the impact of a CAR/PEB on the resist profile | Jensheng Huang, Chun-Chieh Kuo | 2011-04-26 |