Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7934176 | Method and apparatus for determining a process model that models the impact of a CAR/PEB on the resist profile | Jensheng Huang, Lawrence S. Melvin, III | 2011-04-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7934176 | Method and apparatus for determining a process model that models the impact of a CAR/PEB on the resist profile | Jensheng Huang, Lawrence S. Melvin, III | 2011-04-26 |