Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972973 | Method for forming silicon oxide film, plasma processing apparatus and storage medium | Takashi Kobayashi, Toshihiko Shinozawa, Junichi Kitagawa | 2011-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972973 | Method for forming silicon oxide film, plasma processing apparatus and storage medium | Takashi Kobayashi, Toshihiko Shinozawa, Junichi Kitagawa | 2011-07-05 |