Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003296 | Chemically amplified positive resist composition | Masahiko Shimada, Junji Shigematsu, Takayuki Miyagawa, Satoshi Yamamoto | 2011-08-23 |
| 7998656 | Chemically amplified positive resist composition | Masahiko Shimada, Satoshi Yamaguchi, Soon Shin Kim, Yoshiyuki Takata, Takashi Hiraoka | 2011-08-16 |
| 7972763 | Chemically amplified positive resist composition | Masumi Suetsugu, Makoto Akita | 2011-07-05 |
| 7893293 | Chemically amplified positive resist composition | Makoto Akita, Isao Yoshida | 2011-02-22 |