Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8066898 | Surface treatment solution for the fine surface processing of a glass substrate containing multiple ingredients | Hirohisa Kikuyama, Tatsuhiro Yabune, Tadahiro Ohmi | 2011-11-29 |
| 7994063 | Method for manufacturing semiconductor device and method for cleaning semiconductor substrate | Tadahiro Ohmi, Akinobu Teramoto, Rui Hasebe | 2011-08-09 |