Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892980 | Apparatus and a method for controlling the depth of etching during alternating plasma etching of semiconductor substrates | Michel Puech | 2011-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892980 | Apparatus and a method for controlling the depth of etching during alternating plasma etching of semiconductor substrates | Michel Puech | 2011-02-22 |