Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7938907 | Device for fabricating a mask by plasma etching a semiconductor substrate | Martial Chabloz | 2011-05-10 |
| 7892980 | Apparatus and a method for controlling the depth of etching during alternating plasma etching of semiconductor substrates | Nicolas Launay | 2011-02-22 |