Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977243 | Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus | Naoki Yahata, Ryuichi Matsuda, Yoshiyuki Ooba, Toshihiko Nishimori | 2011-07-12 |
| 7923374 | Method and apparatus for production of metal film or the like | Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro +1 more | 2011-04-12 |