Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977243 | Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus | Hitoshi Sakamoto, Naoki Yahata, Yoshiyuki Ooba, Toshihiko Nishimori | 2011-07-12 |