Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8022448 | Apparatus and methods for evaporation including test wafer holder | Lam T. Luu, Richard S. Bingle, Jens Albrecht Riege, Heather L. Knoedler, Daniel C. Weaver | 2011-09-20 |