Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030725 | Apparatus and methods for detecting evaporation conditions | Lam T. Luu, Heather L. Knoedler, Daniel C. Weaver | 2011-10-04 |
| 8022448 | Apparatus and methods for evaporation including test wafer holder | Lam T. Luu, Shiban K. Tiku, Jens Albrecht Riege, Heather L. Knoedler, Daniel C. Weaver | 2011-09-20 |