Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021805 | Backside phase grating mask and method for manufacturing the same | Byung Ho Nam | 2011-09-20 |
| 7977016 | Method for fabricating extreme ultraviolet lithography mask | Yong Kyoo Choi | 2011-07-12 |