Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021805 | Backside phase grating mask and method for manufacturing the same | Sung Hyun Oh | 2011-09-20 |
| 7902671 | Semiconductor device having dummy pattern and the method for fabricating the same | — | 2011-03-08 |