Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986049 | Semiconductor device having multiple-layer hard mask with opposite stresses and method for fabricating the same | Jung-Seock Lee | 2011-07-26 |
| 7867911 | Method for forming pattern using hard mask | Ky-Hyun Han | 2011-01-11 |