Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986049 | Semiconductor device having multiple-layer hard mask with opposite stresses and method for fabricating the same | Ki-Won Nam | 2011-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986049 | Semiconductor device having multiple-layer hard mask with opposite stresses and method for fabricating the same | Ki-Won Nam | 2011-07-26 |