Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070882 | Method for the wet-chemical treatment of a semiconductor wafer | Clemens Zapilko, Thomas Buschhardt, Diego Feijoo, Teruo Haibara, Yoshihiro Mori | 2011-12-06 |
| 7972963 | Polished semiconductor wafer and process for producing it | Thomas Teuschler, Maximilian Stadler | 2011-07-05 |
| 7938911 | Process for cleaning a semiconductor wafer using a cleaning solution | Clemens Zapilko, Thomas Buschhardt, Diego Feijoo | 2011-05-10 |