Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070882 | Method for the wet-chemical treatment of a semiconductor wafer | Guenter Schwab, Thomas Buschhardt, Diego Feijoo, Teruo Haibara, Yoshihiro Mori | 2011-12-06 |
| 7938911 | Process for cleaning a semiconductor wafer using a cleaning solution | Thomas Buschhardt, Diego Feijoo, Guenter Schwab | 2011-05-10 |