Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068326 | Electrostatic chuck and substrate temperature control fixing apparatus | Koki Tamagawa | 2011-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068326 | Electrostatic chuck and substrate temperature control fixing apparatus | Koki Tamagawa | 2011-11-29 |