Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068326 | Electrostatic chuck and substrate temperature control fixing apparatus | Tomoaki Koyama | 2011-11-29 |
| 8023248 | Electrostatic chuck | Hiroshi Yonekura | 2011-09-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068326 | Electrostatic chuck and substrate temperature control fixing apparatus | Tomoaki Koyama | 2011-11-29 |
| 8023248 | Electrostatic chuck | Hiroshi Yonekura | 2011-09-20 |