Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871761 | Resist lower layer material, resist lower layer substrate comprising the material and method for forming pattern | Jun Hatakeyama, Youichi Ohsawa | 2011-01-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871761 | Resist lower layer material, resist lower layer substrate comprising the material and method for forming pattern | Jun Hatakeyama, Youichi Ohsawa | 2011-01-18 |