Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7863204 | Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure | Toshimitsu Miyata, Masakazu Shimada, Kimio Kitamura, Kenji Tanaka | 2011-01-04 |