Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030599 | Substrate processing apparatus, heating device, and semiconductor device manufacturing method | — | 2011-10-04 |
| 7863204 | Substrate processing apparatus, heating apparatus for use in the same, method of manufacturing semiconductors with those apparatuses, and heating element supporting structure | Toshimitsu Miyata, Akira Hayashida, Kimio Kitamura, Kenji Tanaka | 2011-01-04 |