Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034183 | Cleaning method and plasma processing method | Takashi Kobayashi, Junichi Kitagawa | 2011-10-11 |
| 7875322 | Plasma processing method | Takashi Kobayashi, Junichi Kitagawa | 2011-01-25 |