Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7994031 | Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions | Thomas N. Horsky, Dale C. Jacobson | 2011-08-09 |
| 7919402 | Cluster ion implantation for defect engineering | Dale C. Jacobson, Thomas N. Horsky, Karuppanan Sekar | 2011-04-05 |