Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071958 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Thomas N. Horsky | 2011-12-06 |
| 7994031 | Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions | Thomas N. Horsky, Wade A. Krull | 2011-08-09 |
| 7960709 | Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions | Thomas N. Horsky | 2011-06-14 |
| 7919402 | Cluster ion implantation for defect engineering | Thomas N. Horsky, Wade A. Krull, Karuppanan Sekar | 2011-04-05 |