Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8069423 | System and method for model based multi-patterning optimization | Justin Ghan | 2011-11-29 |
| 7913197 | Method for double patterning lithography | Michiel Victor Paul Kruger, Bayram Yenikaya, Anwei Liu, Wolf Staud | 2011-03-22 |