Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7913197 | Method for double patterning lithography | Michiel Victor Paul Kruger, Bayram Yenikaya, Abdurrahman Sezginer, Wolf Staud | 2011-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7913197 | Method for double patterning lithography | Michiel Victor Paul Kruger, Bayram Yenikaya, Abdurrahman Sezginer, Wolf Staud | 2011-03-22 |